产品用途：
用作半导体MOCVD设备的部件。
Application:
They are used as a component of semiconductor MOCVD system.
产品加工精度参数/Product Processing Accuracy Parameters：
|
主要材质Main Materials
|
加工范围Processing
Range
|
尺寸精度Dimensional Accuracy
(mm)
|
形状精度Shape Accuracy
(mm)
|
位置精度Position Accuracy (mm)
|
光洁度Finish
(Ra, μm)
|
|
W、RE
|
0.00-5.00
|
±0.003
|
0.01
|
0.005
|
0.2-0.4
|
|
W、RE
|
5.01-15.00
|
±0.005
|
0.015
|
0.006
|
0.4
|
|
W、RE
|
15.01-30
|
±0.008
|
0.02
|
0.007
|
0.4
|
|
W、RE
|
30.01-100
|
±0.010
|
0.025
|
0.008
|
0.6
|
|
W、RE
|
>100
|
±0.0127
|
0.030
|
0.010
|
0.6
|
