产品用途：
用来生产半导体离子注入零件。
Application:
They are used to produce parts of the semiconductor ion implanter.
产品性能参数/Product Property Parameters：
|
产品名称Name
|
W
|
Mo
|
TZM
|
|
密度Density
(g/cm3)
|
19.1
|
10.15
|
10.05
|
产品加工精度参数/Product Processing Accuracy Parameters：
|
主要材质
Main Materials
|
加工范围
Processing
Range
|
尺寸精度Dimensional Accuracy (mm)
|
形状精度Shape Accuracy (mm)
|
位置精度Position Accuracy (mm)
|
光洁度Finish
(Ra, μm)
|
|
W、M、TZM
|
0.00-5.00
|
±0.003
|
0.01
|
0.005
|
0.2-0.4
|
|
W、M、TZM
|
5.01-15.00
|
±0.005
|
0.015
|
0.006
|
0.4
|
|
W、M、TZM
|
15.01-30
|
±0.008
|
0.02
|
0.007
|
0.4
|
|
W、M、TZM
|
30.01-100
|
±0.010
|
0.025
|
0.008
|
0.6
|
|
W、M、TZM
|
> 100
|
±0.0127
|
0.030
|
0.010
|
0.6
|
