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  • Tantalum Rings & Tantalum Target
  • Tantalum Rings & Tantalum Target

Tantalum Rings & Tantalum Target

As a special electronic material with high added values, semiconductor targets are mainly used in microelectronics, display, memory, optical coating and other industries to sputter various thin film materials for cutting-edge technology.

Product Description


产品用途:

作为一种具有高附加价值的特种电子材料,主要使用在微电子,显示器,存储器以及光学镀膜等产业,用以溅射用于尖端技术的各种薄膜材料。

Application:

As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.

 

产品性能参数/Product Property Parameters:

牌号 Grade

DTa1

DTa2

DTa3

 

 

 

 

化学成分

Chemical Compositions

%,不大于/max

Ta

99.95

99.99

99.995

C

0.01

0.003

0.002

N

0.005

0.005

0.004

H

0.0015

0.0015

0.001

O

0.015

0.01

0.005

Nb

0.02

0.005

0.002

Fe

0.005

0.0005

0.0001

Ti

0.002

0.001

0.0005

W

0.005

0.001

0.001

Mo

0.005

0.001

0.001

Si

0.005

0.001

0.0001

Ni

0.002

0.0001

0.0001

 

 

 

 

其他性能

Other Properties

平均晶粒尺寸

Average Grain Size

(μm)

100um

粗糙度粗糙度

Roughness

(Ra, μm)

Ra0.8-1.2

平面度平面度

Flatness

mm

0.10

 

尺寸Sizes:

形状

Shape

厚度

Thicknessmm

宽度

Widthmm

长度

Lengthmm

直径

Diametermm

圆形Round

3-25

-

-

450

方形Square

3-25

600

2000

-

 

注:如有特殊要求,双方具体商定。

Note: Special requirements will be agreed upon by the supplier and buyer.


Telephone

0731-88056699

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