Tantalum Rings & Tantalum Target

As a special electronic material with high added values, semiconductor targets are mainly used in microelectronics, display, memory, optical coating and other industries to sputter various thin film materials for cutting-edge technology.

Product Description

产品用途：

作为一种具有高附加价值的特种电子材料，主要使用在微电子，显示器，存储器以及光学镀膜等产业，用以溅射用于尖端技术的各种薄膜材料。

Application:

As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.

产品性能参数/Product Property Parameters：

牌号 Grade		DTa1	DTa2	DTa3
化学成分 Chemical Compositions （%，不大于/max）	Ta	≥99.95	≥99.99	≥99.995
	C	0.01	0.003	0.002
	N	0.005	0.005	0.004
	H	0.0015	0.0015	0.001
	O	0.015	0.01	0.005
	Nb	0.02	0.005	0.002
	Fe	0.005	0.0005	0.0001
	Ti	0.002	0.001	0.0005
	W	0.005	0.001	0.001
	Mo	0.005	0.001	0.001
	Si	0.005	0.001	0.0001
	Ni	0.002	0.0001	0.0001
其他性能 Other Properties	平均晶粒尺寸 Average Grain Size (μm)	≤100um
	粗糙度粗糙度 Roughness (Ra, μm)	Ra0.8-1.2
	平面度平面度 Flatness （mm）	≤0.10％

尺寸Sizes:

形状

Shape

厚度

Thickness（mm）

宽度

Width（mm）

长度

Length（mm）

直径

Diameter（mm）

圆形Round

3-25

≤450

方形Square

3-25

≤600

≤2000

注：如有特殊要求，双方具体商定。

Note: Special requirements will be agreed upon by the supplier and buyer.

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