Flat Panel Display Target

High-purity Copper Planar Target and Rotary Target

product description


产品用途:

用作承担信号传输的TFT电极布线材料。

Application:

It is used as TFT electrode wiring material for signal transmission.

 

产品性能参数/Product Property Parameters:

化学成分

Chemical Compositions

主含量,(%,不小于)

Main Content, %, min

Cu

99.995

 

 

 

 

 

 

 

杂质含量

(质量分数),

%, 不大于)

Impurity Content (mass fraction), %, max

P

0.0003

Sb

0.0004

As

0.0005

Bi

0.0001

Cd

0.0001

Fe

0.0010

Pb

0.0005

Mn

0.0005

Ni

0.0010

Se

0.0003

Ag

0.0025

S

0.0015

Te

0.0002

Sn

0.0002

Zn

0.0001

O

0.0005

注: 铜含量为100%减去表中所列杂质元素实测含量的总和(不包含气体元素);需方如有特殊要求时,由供需双方协商确定,并在合同或订货单中注明。

Note: Copper content is the sum of 100% minus the measured content of impurity elements listed in the table (excluding gas elements). Special requirements will be agreed upon by the supplier and buyer, and indicated in the contract or purchase order.

 

 

其他性能Other properties:

牌号

Grade

密度

Density

(g/cm3)

平均晶粒尺寸Average Grain Size (μm)

粗糙度Roughness

(μm)

直线度Straightness

(mm)

贴合率Bonding Rate

Cu

8.94

≤100

0.8

0.30

97%

 

尺寸Size:

形状Shape

产品世代

靶材尺寸(mm

 

平面

Planar

G6

2300*190*16

G8.5

2650*210*18

G10.5

3430*200*20

旋转

Rotary

G6

φ135/167*2158

G8.5

φ135/167*2692


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